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    M6E-2200B-R


    ★ It is consisted XYZ manual positioning stage, a tilt stage (θx, θy) and a goniometer stage(θz). It is a 6-axis high resolution positioning stage to be designed to perform the single-fiber positioning or as the application for industry of optical waveguide.
    ★ Available potion with ordering code - M5E-2000B-R-[XYZ module: MXYZ60-ACSR、Tilt module: MTR60-45R、α-axis stage: MXG6-50VMR]
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    Update:2022.7.21

    Model No.

    M6E-2200B-R

    Specification

    Axis

    X

    Y

    Z

    θx

    θy

    θz

    Travel Stroke

    Rough Tuning

    ± 6.5 mm

    ± 6.5 mm

    ± 6.5 mm

    ± 3 °

    ± 3 °

    ± 4 °

    Fine Tuning

    ± 0.3 mm

    ± 0.3 mm

    ± 0.3 mm

    Accuracy

    Rough Tuning

    10 μm

    10 μm

    10 μm

    ≒ 29.3" / Vernier

    ≒ 27.8" / Vernier

    ≒ 33" / Vernier

    Fine Tuning

    0.5 μm

    0.5 μm

    0.5 μm

     

    Feed Position

     

    Characterisitc of Different Guiding Type

     

    The Main Feeding Mode of Mini Stages